Semiconductor optical amplifier and semiconductor laser

ABSTRACT

A semiconductor optical amplifier includes (a) a basic mode waveguide region which provides a basic mode to a guide wave light, (b) a first multi-mode waveguide region which has a greater waveguide width than that of the basic mode waveguide region, is optically connected to the basic mode waveguide region, and provides a mode including a multi-mode, to the guided wave light, and (c) a second multi-mode waveguide region which has a greater waveguide width than that of the first multi-mode waveguide region, is optically connected to the first multi-mode waveguide region, and provides a mode including a multi-mode, to the guided wave light.

BACKGROUND OF THE INVENTION

[0001] 1. Field of the Invention

[0002] The invention relates to a semiconductor optical amplifier and a semiconductor laser, and more particularly to a semiconductor optical amplifier transmitting improved saturated output, and a semiconductor laser transmitting enhanced output power.

[0003] 2. Description of the Related Art

[0004] A semiconductor optical amplifier has the following advantages in comparison with other optical amplifiers.

[0005] First, a semiconductor optical amplifier can be formed smaller in size than other optical amplifiers.

[0006] Second, a semiconductor optical amplifier can be integrated with other functional devices.

[0007] Third, a semiconductor optical amplifier can newly have various functions.

[0008] Thus, a semiconductor optical amplifier is presently researched and developed.

[0009] In particular, a waveguide type semiconductor optical amplifier has a function of transmitting data expressed in the form of a signal, together with a light. Hence, a waveguide type semiconductor optical amplifier is generally designed to include a waveguide which satisfies basic mode conditions or pseudo basic mode conditions. This is because, if a signal light had a multi-mode, there would be caused problems that a signal light would be influenced by multi-mode dispersion, and that it would be difficult to efficiently apply a signal light to other optical waveguides or lens.

[0010] On the other hand, if a waveguide type semiconductor optical amplifier is designed to satisfy a pseudo basic mode, there would be caused a problem that a semiconductor optical amplifier had limited laser characteristics. For instance, in a semiconductor laser, a width and a thickness of an active layer is limited by basic mode conditions. One of the simplest methods of improving a gain saturation level is to widen a width of a waveguide, for instance. However, this method is limited by the basic mode conditions as mentioned above, and hence, there is limitation in increasing output power.

[0011] In order to delete dependency on a polarized light, and avoid the limitation caused by the above-mentioned basic mode conditions, Japanese Unexamined Patent Publication No. 11-132798 (A) has suggested a semiconductor optical amplifier. The suggested semiconductor optical amplifier is an active MMI (Multi-Mode Interference) type one, and is designed to include a 1×1-MMI waveguide in the vicinity of an output end for improving a saturated output level. By improving a saturated output level by 10 dB or more, the above-mentioned problem of gain saturation in the vicinity of an output end can be solved. However, there is caused another problem that gain saturation in a single mode waveguide located in the vicinity of a MMI waveguide limits a saturated output level.

[0012] Japanese Unexamined Patent Publication No. 2000-323781 (A) has suggested a semiconductor optical amplifier and a semiconductor laser each of which includes a basic mode waveguide, and a multi-mode waveguide having a waveguide width greater than a width of the basic mode waveguide and optically connected to the multi-mode waveguide. By connecting the multi-mode waveguide having a greater width than that of the basic mode waveguide, to the basic mode waveguide, there is obtained the advantage which would be obtained by widening a waveguide width of a portion of the basic mode waveguide, and it would be possible to improve a gain saturation level (saturated output level) without changing basic mode conditions. As a result, it would be possible to provide the semiconductor laser with enhanced output power, and to improve COD level and spatial hole burning, prevent efficiency reduction caused by mode conversion loss, and enhance mode stability in the semiconductor laser.

[0013] However, the active MMI type optical amplifier suggested in Japanese Unexamined Patent Publication No. 11-132798 (A) is accompanied with a problem that gain saturation would be remarkable in a basic mode waveguide located in the vicinity of a MMI waveguide, if a saturated output is to be improved by 10 dB or more, and thus, a saturated output level is limited. An active MMI type semiconductor laser which is covered at a rear end thereof with a film having a high reflection rate and at a front end thereof with a film having a low reflection rate is accompanied with the same problem as mentioned above.

[0014] The semiconductor optical amplifier and the semiconductor laser suggested in Japanese Unexamined Patent Publication No. 2000-323781 (A) is designed to include a multi-mode waveguide region for widen a waveguide width as much as possible in order to reduce power consumption and improve a saturation level. This structure causes a significant difference in waveguide widths. Hence, the multi-mode waveguide region causes a problem that gain saturation appears remarkable for an intensive incident light, resulting in that expected performances cannot be obtained.

[0015] Japanese Unexamined Patent Publication No. 11-68240 (A) has suggested a semiconductor optical amplifier which emits a single mode light and has a waveguide structure including a multi-mode waveguide region.

[0016] Japanese Unexamined Patent Publication No. 11-68241 (A) has suggested a semiconductor laser which emits a single mode light and has a waveguide structure including a multi-mode waveguide region.

[0017] However, the above-mentioned problems remain unsolved even in those Publications.

SUMMARY OF THE INVENTION

[0018] In view of the above-mentioned problems in the conventional semiconductor optical amplifiers and semiconductor laser, it is an object of the present invention to provide a semiconductor optical amplifier which is capable of improving a saturated output of an active MMI type optical amplifier, and producing high output power.

[0019] It is also an object of the present invention to provide a semiconductor laser which is capable of producing higher output power than that of an active MMI type semiconductor laser.

[0020] In one aspect of the present invention, there is provided a semiconductor optical amplifier including (a) a basic mode waveguide region which provides a basic mode to a guide wave light, (b) a first multi-mode waveguide region which has a greater waveguide width than that of the basic mode waveguide region, is optically connected to the basic mode waveguide region, and provides a mode including a multi-mode, to the guided wave light, and (c) a second multi-mode waveguide region which has a greater waveguide width than that of the first multi-mode waveguide region, is optically connected to the first multi-mode waveguide region, and provides a mode including a multi-mode, to the guided wave light.

[0021] In accordance with the above-mentioned semiconductor optical amplifier, the first and second multi-mode waveguide regions are designed to have an increasing waveguide width. Hence, it would be possible to prevent deterioration in performances of the semiconductor optical amplifier caused by connection of waveguide regions to each other, and improve a saturated output level with both the basic mode characteristic and the dependency on polarized light being sustained.

[0022] It is preferable that each of the first and second multi-mode waveguide regions is formed as a 1×1 multi-mode waveguide.

[0023] There is further provided a semiconductor optical amplifier including (a) a basic mode waveguide region which provides a basic mode to a guide wave light, (b) a first multi-mode waveguide region which has a greater waveguide width than that of the basic mode waveguide region, is optically connected to the basic mode waveguide region, and provides a mode including a multi-mode, to the guided wave light, and (c) a second multi-mode waveguide region which has a greater waveguide width than that of the first multi-mode waveguide region, is optically connected to the first multi-mode waveguide region, and provides a mode including a multi-mode, to the guided wave light, wherein at least one of the first and second multi-mode waveguide regions is comprised of a plurality of such sub-regions that a sub-region located closer to an output end of the semiconductor optical amplifier has a greater waveguide width.

[0024] In accordance with the above-mentioned semiconductor optical amplifier, a multi-mode waveguide region includes the first and second multi-mode waveguide regions, the first and second multi-mode waveguide regions have different waveguide widths from each other, and the first and/or second multi-mode waveguide regions are(is) comprised of a plurality of such sub-regions that a sub-region located closer to an output end of the semiconductor optical amplifier has a greater waveguide width. This structure prevents deterioration in performances of the semiconductor optical amplifier caused by connections between the waveguide regions, and makes it possible to improve a saturated output level with both the basic mode characteristic and the dependency on polarized light being sustained.

[0025] It is preferable that the semiconductor optical amplifier further includes a second basic mode waveguide region or a pseudo basic mode waveguide region, both optically connected to the second multi-mode waveguide region at its output end.

[0026] For instance, the second basic mode waveguide region or the pseudo basic mode waveguide region may be formed of a single mode waveguide, a 1×1 multi-mode interference (MMI), or a waveguide allowing a primary mode.

[0027] In another aspect of the prevent invention, there is provided a semiconductor laser including (a) a basic mode waveguide region which is covered at a rear end thereof with an all-reflection coating and at a front end thereof with a non-reflection coating, and provides a basic mode to a guide wave light, (b) a first multi-mode waveguide region which has a greater waveguide width than that of the basic mode waveguide region, is optically connected to the basic mode waveguide region, and provides a mode including a multi-mode, to the guided wave light, and (c) a second multi-mode waveguide region which has a greater waveguide width than that of the first multi-mode waveguide region, is optically connected to the first multi-mode waveguide region, and provides a mode including a multi-mode, to the guided wave light.

[0028] In accordance with the above-mentioned semiconductor laser, the first and second multi-mode waveguide regions are designed to have an increasing waveguide width. Hence, it would be possible to prevent deterioration in performances of the semiconductor laser caused by connection of waveguide regions to each other, and increase output power in a basic mode.

[0029] There is further provided a semiconductor laser including (a) a basic mode waveguide region which is covered at a rear end thereof with an all-reflection coating and at a front end thereof with a non-reflection coating, and provides a basic mode to a guide wave light, (b) a first multi-mode waveguide region which has a greater waveguide width than that of the basic mode waveguide region, is optically connected to the basic mode waveguide region, and provides a mode including a multi-mode, to the guided wave light, and (c) a second multi-mode waveguide region which has a greater waveguide width than that of the first multi-mode waveguide region, is optically connected to the first multi-mode waveguide region, and provides a mode including a multi-mode, to the guided wave light, wherein at least one of the first and second multi-mode waveguide regions is comprised of a plurality of such sub-regions that a sub-region located closer to an output end of the semiconductor optical amplifier has a greater waveguide width.

[0030] In accordance with the above-mentioned semiconductor laser, a multi-mode waveguide region includes the first and second multi-mode waveguide regions, the first and second multi-mode waveguide regions have different waveguide widths from each other, and the first and/or second multi-mode waveguide regions are(is) comprised of a plurality of such sub-regions that a sub-region located closer to an output end of the semiconductor optical amplifier has a greater waveguide width. This structure prevents deterioration in performances of the semiconductor laser caused by connections between the waveguide regions, and makes it possible to increase output power in a basic mode.

[0031] The above and other objects and advantageous features of the present invention will be made apparent from the following description made with reference to the accompanying drawings, in which like reference characters designate the same or similar parts throughout the drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

[0032]FIG. 1 is a plan view of the semiconductor optical amplifier in accordance with the first embodiment of the present invention.

[0033]FIGS. 2A to 2D are cross-sectional views of the semiconductor optical amplifier illustrated in FIG. 1, illustrating respective steps in a method of fabricating the same.

[0034]FIG. 3 is a plan view of the semiconductor optical amplifier in accordance with the second embodiment of the present invention.

[0035]FIG. 4 is a plan view of the semiconductor optical amplifier in accordance with the third embodiment of the present invention.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0036] Preferred embodiments in accordance with the present invention will be explained hereinbelow with reference to drawings.

[0037] [First Embodiment]

[0038]FIG. 1 illustrates a semiconductor optical amplifier in accordance with the first embodiment of the present invention.

[0039] As illustrated in FIG. 1, the semiconductor optical amplifier is designed to have a waveguide structure and a buried heterostructure (BH), and is designed to emit a light having a wavelength of 1.55 micrometers, for instance.

[0040] The semiconductor optical amplifier in accordance with the first embodiment is comprised of a substrate 21 having a width W4, a basic mode waveguide region 1 which is formed on the substrate 21 and provides a basic mode to a guide wave light, a first multi-mode waveguide region 2 formed on the substrate 21, and a second multi-mode waveguide region 3 formed on the substrate 21.

[0041] The first multi-mode waveguide region 2 has a greater waveguide width than that of the basic mode waveguide region 1, is optically connected to the basic mode waveguide region 1, and provides a mode including a multi-mode, to the guided wave light. The second multi-mode waveguide region 3 has a greater waveguide width than that of the first multi-mode waveguide region 2, is optically connected to the first multi-mode waveguide region 2, and provides a mode including a multi-mode, to the guided wave light.

[0042] Assuming that the basic mode waveguide region 1 has a waveguide width W1, the first multi-mode waveguide region 2 has a waveguide width W2, and the second multi-mode waveguide region 3 has a waveguide width W3, the widths W1, W2 and W3 are determined as follows.

W3>W2>W1

[0043] In accordance with the semiconductor optical amplifier, a multi-mode waveguide region is designed to be comprised of a plurality of waveguide regions such as the first and second multi-mode waveguide regions 2 and 3, wherein the multi-mode waveguide region is designed to have an increasing waveguide width towards an output end of the semiconductor optical amplifier. This structure ensures that a basic mode waveguide comprised of the waveguide regions 1 to 3 partially has a gradually increasing waveguide width, and hence, improves a saturated output level necessary for increasing output power.

[0044] Each of the first and second multi-mode waveguide regions 2 and 3 is formed as a one-input and one-output type multi-mode interference waveguide (1×1-MMI). The basic mode waveguide region 1 has a waveguide length of about 490 micrometers, the first multi-mode waveguide region 2 has a waveguide length of about 75 micrometers, and the second multi-mode waveguide region 3 has a waveguide length of about 185 micrometers. Hence, the semiconductor optical amplifier in accordance with the first embodiment has a total waveguide length of about 750 micrometers.

[0045] In the first embodiment, the first multi-mode waveguide region 2 formed as a 1×1-MMI is arranged between the basic mode waveguide region 1 and the second multi-mode waveguide region 3. Though the first and second multi-mode waveguide regions 2 and 3 are formed as a multi-mode waveguide, they act as a pseudo basic mode waveguide at their longitudinal opposite ends. In a pseudo basic mode waveguide, only a basic mode light is transferred. Accordingly, a basic mode light having been transferred through the basic mode waveguide region 1 is developed into a multi-mode light in the first multi-mode waveguide region 2, but is output from the first multi-mode waveguide region 2 at an output end thereof as a basic mode light. Similarly, a basic mode light output from the first multi-mode waveguide region 2 and entering the second multi-mode waveguide region 3 is developed into a multi-mode light in the second multi-mode waveguide region 3, but is output from the second multi-mode waveguide region 3 at an output end thereof as a basic mode light.

[0046] As a result, gain saturation of the first multi-mode waveguide region 2 is improved in comparison with a gain saturation level of the basic mode waveguide region 1, obtained when the second multi-mode waveguide region 3 is directly connected to the basic mode waveguide region 1. Hence, it would be possible to ensure a higher saturated output power than that of a conventional active MMI type semiconductor optical amplifier. In addition, it is also possible to improve spatial hole burning, ensuring a stable horizontal mode.

[0047] A semiconductor laser would be obtained by applying a half or all reflection coating to the basic mode waveguide region 1 at a rear end thereof and applying an antireflection coating to the second multi-mode waveguide region 3 at an output end thereof. Since the semiconductor laser includes the first multi-mode waveguide region 2, it would ensure high output power, similarly to the semiconductor optical amplifier in accordance with the first embodiment.

[0048] Hereinbelow is explained a method of fabricating the semiconductor optical amplifier in accordance with the first embodiment.

[0049]FIGS. 2A to 2D are cross-sectional views of the semiconductor optical amplifier in accordance with the first embodiment, illustrating only typical steps in a method of fabricating the same. In FIGS. 2A to 2D, only the first multi-mode waveguide region 2 is illustrated, but it should be noted that the basic mode waveguide region 1 and the second multi-mode waveguide region 3 have the same structure as that of the first multi-mode waveguide region 2 except a waveguide width W.

[0050] A basic mode waveguide and a multi-mode waveguide are structurally different from each other with respect to factors such as a width, a length, an index of refraction and a wavelength. Hence, a basic mode waveguide and a multi-mode waveguide can be formed by differentiating those factors.

[0051] Though FIGS. 2A to 2D illustrate a method of fabricating a semiconductor optical amplifier, the illustrated method can be modified into a method of fabricating a semiconductor laser, by adding steps of applying a half or all reflection coating to the basic mode waveguide region 1 at an end thereof, and applying an antireflection coating to the second multi-mode waveguide region 3 at an output end thereof.

[0052] Hereinbelow is explained the method of fabricating the semiconductor optical amplifier in accordance with the first embodiment, with reference to FIGS. 2A to 2D.

[0053] First, as illustrated in FIG. 2A, an n-InP buffer layer 22, a 1.55 micrometers structured InGaAsP active layer 23, and a p-InP first clad layer 24 are formed on an n-InP substrate 21 having a waveguide width W4, by MOVPE. The n-InP buffer layer 22 has a thickness of about 100 micrometers, the 1.55 micrometers structured InGaAsP active layer 23 has a thickness of about 300 micrometers, and the p-InP clad layer 24 has a thickness of about 100 micrometers.

[0054] Then, a mask 31 for forming a mesa is formed on the p-InP clad layer 24 by photolithography and wet etching.

[0055] Then, as illustrated in FIG. 2B, the p-InP clad layer 24, the 1.55 micrometers structured InGaAsP active layer 23, the n-InP buffer layer 22 and the n-InP substrate 21 are partially removed by reactive ion etching (RIE) through the use of the mask 31. As a result, there is formed a mesa, as illustrated in FIG. 2B.

[0056] Then, as illustrated in FIG. 2C, a p-InP current blocking layer 25 and an n-InP current blocking layer 26 are formed around a sidewall of the mesa by MOVPE. The p-InP current blocking layer 25 and the n-InP current blocking layer 26 have a thickness of about one micrometer.

[0057] Then, as illustrated in FIG. 2D, after remove of the mask 31 through the use of buffered hydrofluoric acid, a p-InP second clad layer 27 is formed on both the p-InP clad layer 24 and the n-InP current blocking layer 26 by MOVPE, and successively, a p+ InGaAs cap layer 28 is formed on the p-InP second clad layer 27.

[0058] Then, the resultant resulted from the step illustrated in FIG. 2D is polished at a rear surface thereof (namely, a bottom surface of the drawing), and then, a rear surface electrode and a top surface electrode are formed on the rear surface by sputtering. Then, the resultant is cloven, and an antireflection coating is applied to a clove surface.

[0059] Thus, there is completed a semiconductor optical amplifier.

[0060] [Second Embodiment]

[0061]FIG. 3 illustrates a semiconductor optical amplifier in accordance with the second embodiment of the present invention.

[0062] Similarly to the semiconductor optical amplifier in accordance with the first embodiment, the semiconductor optical amplifier in accordance with the second embodiment is designed to have a buried heterostructure (BH), and is designed to emit a light having a wavelength of 1.55 micrometers.

[0063] The semiconductor optical amplifier in accordance with the second embodiment is comprised of a substrate 21 having a width W4, a basic mode waveguide region 1 which is formed on the substrate 21 and provides a basic mode to a guide wave light, a first multi-mode waveguide region 2 formed on the substrate 21, a second multi-mode waveguide region 3 formed on the substrate 21, and a second basic mode waveguide region 4 optically connected to the second multi-mode waveguide region 3 at its output end.

[0064] That is, the semiconductor optical amplifier in accordance with the second embodiment is structurally different from the semiconductor optical amplifier in accordance with the first embodiment in additionally including the second basic mode waveguide region 4.

[0065] The second basic mode waveguide region 4 may be formed also as a pseudo basic mode waveguide region.

[0066] The second basic mode waveguide region 4 may be formed of a single mode waveguide, a 1×1-MMI waveguide, or a waveguide allowing a primary mode.

[0067] In the second embodiment, both of the first and second multi-mode waveguide regions 2 and 3 are formed of a 1×1-MMI waveguide.

[0068] The second basic mode waveguide region 4 arranged at an output end of the semiconductor optical amplifier ensures that the second multi-mode waveguide region 3 may be designed to have any length regardless of cleavage position, and hence, the semiconductor optical amplifier could be fabricated with a high fabrication yield.

[0069] In the semiconductor optical amplifier illustrated in FIG. 3, the basic mode waveguide region 1 has a waveguide length of about 460 micrometers, the first multi-mode waveguide region 2 has a waveguide length of about 75 micrometers, the second multi-mode waveguide region 3 has a waveguide length of about 185 micrometers, and the second basic mode waveguide region 4 has a waveguide length of about 30 micrometers. Hence, the semiconductor optical amplifier in accordance with the second embodiment has a total waveguide length of about 750 micrometers.

[0070] The semiconductor optical amplifier in accordance with the second embodiment may be fabricated through the same method as the above-mentioned method of fabricating the semiconductor optical amplifier in accordance with the first embodiment. Hence, the method of fabricating the semiconductor optical amplifier in accordance with the second embodiment is omitted.

[0071] In the second embodiment, the active layer 23 is formed as a 1.55 micrometers structured InGaAsP active layer, and has a current bottleneck structure surrounded by the p-InP current blocking layer 25 and the n-InP current blocking layer 26. Above the active layer 23 and the current blocking layers 25 and 26 are formed the p-InP clad layer 27 and the p-InGaAs layer 28. The basic mode waveguide region 1 has a waveguide width W1 of 0.5 micrometers, the first multi-mode waveguide region 2 has a waveguide width W2 of 5 micrometers, and the second multi-mode waveguide region 3 has a waveguide width W3 of 38.5 micrometers.

[0072] Similarly to the semiconductor optical amplifier in accordance with the first embodiment, the semiconductor optical amplifier in accordance with the second embodiment can provide a high saturated output level. The semiconductor optical amplifier in accordance with the second embodiment is designed to include the second basic mode waveguide region 4 having a small waveguide length, optically connected to an output end of the semiconductor optical amplifier, but transmits saturated output power which is scarcely limited by the second basic mode waveguide region 4. This is because that a gain presented by the second basic mode waveguide region 4 is in an almost ignorable level in comparison with a gain totally presented by the semiconductor optical amplifier.

[0073] By arranging the second basic mode waveguide region 4 at an output end of the semiconductor optical amplifier, a length of the second multi-mode waveguide region 3 can be determined regardless of cleavage position, ensuring that the semiconductor optical amplifier in accordance with the second embodiment can be fabricated with a high fabrication yield.

[0074] A semiconductor laser would be obtained by applying a half or all reflection coating to the basic mode waveguide region 1 at a rear end thereof and applying an antireflection (AR) coating to the second basic mode waveguide region 4 at an output end thereof. Since the semiconductor laser includes the first multi-mode waveguide region 2, it would ensure high output power, similarly to the semiconductor optical amplifier in accordance with the second embodiment.

[0075] It is not always necessary for the second basic mode waveguide region 4 to be formed of a basic mode waveguide. For instance, the second basic mode waveguide region 4 may be formed of a waveguide which allows a primary mode, or a 1×1-MMI waveguide having a different width from that of the second basic mode waveguide region 4. Even if the second basic mode waveguide region 4 is formed of a waveguide which allows a primary mode or a 1×1-MMI waveguide, a basic mode and no dependency on a polarized light are maintained.

[0076] [Third Embodiment]

[0077]FIG. 4 illustrates a semiconductor optical amplifier in accordance with the third embodiment of the present invention.

[0078] The semiconductor optical amplifier is designed to have a waveguide structure and a buried heterostructure (BH), and is designed to emit a light having a wavelength of 1.55 micrometers, for instance.

[0079] The semiconductor optical amplifier in accordance with the third embodiment is comprised of a substrate (not illustrated), a basic mode waveguide region 1 which is formed on the substrate and provides a basic mode to a guide wave light, a first multi-mode waveguide region 2 which is formed on the substrate, has a greater waveguide width than that of the basic mode waveguide region 1, is optically connected to the basic mode waveguide region 1, and provides a mode including a multi-mode, to the guided wave light, and a second multi-mode waveguide region 3 which has a greater waveguide width than that of the first multi-mode waveguide region 2, is optically connected to the first multi-mode waveguide region 2, and provides a mode including a multi-mode, to the guided wave light.

[0080] In the third embodiment, as illustrated in FIG. 4, the first multi-mode waveguide region 2 is comprised of a plurality of sub-regions 2-1 to 2-N having widths different from one another. Herein, N indicates an integer equal to or greater than two. A sub-region located closer to an output end of the semiconductor optical amplifier is designed to have a greater waveguide width. Specifically, the N sub-regions 2-1 to 2-N are designed to have widths W2-1 to W2-N defined as follows.

W2-N> - - - >W2-3>W2-2>W2-1

[0081] The semiconductor optical amplifier including the first multi-mode waveguide region 2 having such a structure as illustrated in FIG. 4 could present a higher optical amplification ratio, and a semiconductor laser including the first multi-mode waveguide region 2 having such a structure as illustrated in FIG. 4 could increase its optical output power.

[0082] In place of the first multi-mode waveguide region 2, the second multi-mode waveguide region 3 may be comprised of a plurality of sub-regions 2-1 to 2-N wherein a sub-region located closer to an output end of the semiconductor optical amplifier is designed to have a greater waveguide width. However, a sub-region structure as illustrated in FIG. 4 is more effective in applying to the first multi-mode waveguide region 2, than in applying to the second multi-mode waveguide region 3.

[0083] As an alternative, both of the first and second multi-mode waveguide regions 2 and 3 may be designed to be comprised of a plurality of sub-regions 2-1 to 2-N wherein a sub-region located closer to an output end of the semiconductor optical amplifier is designed to have a greater waveguide width.

[0084] In the above-mentioned first to third embodiments, a semiconductor optical amplifier or a semiconductor laser is designed to have a simply buried structure, but it should be noted that a structure of the semiconductor optical amplifier or semiconductor laser in accordance with the present invention is not to be limited to the buried structure. Other layered structures may be applied to the semiconductor optical amplifier or semiconductor laser in accordance with the present invention. For instance, a double channel planar buried heterostructure (DC-PBH) which is suitable to current bottleneck may be applied to the semiconductor optical amplifier or semiconductor laser in accordance with the present invention.

[0085] In addition, though the semiconductor optical amplifiers in accordance with the above-mentioned first to third embodiments are designed to emit a light having a wavelength of 1.55 micrometers, the semiconductor optical amplifiers may be designed to emit a visible light or a near infrared light such as a light having a wavelength of 0.98 micrometers.

[0086] Furthermore, though the active layer in the above-mentioned first to third embodiments has a bulk structure, the active layer may be designed to have a multi-quantum well (MQW) structure. In the above-mentioned first to third embodiments, MOVPE is used for growing crystal, and RIE is used for forming a mesa. However, other methods may be used for doing the same. For instance, molecular beam epitaxy (MBE) may be used for growing crystal, and inductively couple plasma (ICP) or wet etching may be used for forming a mesa.

[0087] Furthermore, the semiconductor optical amplifier in accordance with the third embodiment may be designed to include the second basic mode waveguide region 4 illustrated in FIG. 3.

[0088] While the present invention has been described in connection with certain preferred embodiments, it is to be understood that the subject matter encompassed by way of the present invention is not to be limited to those specific embodiments. On the contrary, it is intended for the subject matter of the invention to include all alternatives, modifications and equivalents as can be included within the spirit and scope of the following claims.

[0089] The entire disclosure of Japanese Patent Application No. 2001-125210 filed on Apr. 24, 2001 including specification, claims, drawings and summary is incorporated herein by reference in its entirety. 

What is claimed is:
 1. A semiconductor optical amplifier comprising: (a) a basic mode waveguide region which provides a basic mode to a guide wave light; (b) a first multi-mode waveguide region which has a greater waveguide width than that of said basic mode waveguide region, is optically connected to said basic mode waveguide region, and provides a mode including a multi-mode, to said guided wave light; and (c) a second multi-mode waveguide region which has a greater waveguide width than that of said first multi-mode waveguide region, is optically connected to said first multi-mode waveguide region, and provides a mode including a multi-mode, to said guided wave light.
 2. The semiconductor optical amplifier as set forth in claim 1, wherein each of said first and second multi-mode waveguide regions is formed as a 1×1 multi-mode waveguide.
 3. The semiconductor optical amplifier as set forth in claim 1, further comprising one of a second basic mode waveguide region and a pseudo basic mode waveguide region, both optically connected to said second multi-mode waveguide region at its output end.
 4. The semiconductor optical amplifier as set forth in claim 3, wherein each of said second basic mode waveguide region and said pseudo basic mode waveguide region is formed of a single mode waveguide.
 5. The semiconductor optical amplifier as set forth in claim 3, wherein each of said second basic mode waveguide region and said pseudo basic mode waveguide region is formed of a 1×1 multi-mode interference (MMI).
 6. The semiconductor optical amplifier as set forth in claim 3, wherein each of said second basic mode waveguide region and said pseudo basic mode waveguide region is formed of a waveguide allowing a primary mode.
 7. A semiconductor optical amplifier comprising: (a) a basic mode waveguide region which provides a basic mode to a guide wave light; (b) a first multi-mode waveguide region which has a greater waveguide width than that of said basic mode waveguide region, is optically connected to said basic mode waveguide region, and provides a mode including a multi-mode, to said guided wave light; and (c) a second multi-mode waveguide region which has a greater waveguide width than that of said first multi-mode waveguide region, is optically connected to said first multi-mode waveguide region, and provides a mode including a multi-mode, to said guided wave light, wherein at least one of said first and second multi-mode waveguide regions is comprised of a plurality of such sub-regions that a sub-region located closer to an output end of said semiconductor optical amplifier has a greater waveguide width.
 8. The semiconductor optical amplifier as set forth in claim 7, wherein each of said first and second multi-mode waveguide regions is formed as a 1×1 multi-mode waveguide.
 9. The semiconductor optical amplifier as set forth in claim 7, further comprising one of a second basic mode waveguide region and pseudo basic mode waveguide region, both optically connected to said second multi-mode waveguide region at its output end.
 10. The semiconductor optical amplifier as set forth in claim 9, wherein each of said second basic mode waveguide region and said pseudo basic mode waveguide region is formed of a single mode waveguide.
 11. The semiconductor optical amplifier as set forth in claim 9, wherein each of said second basic mode waveguide region and said pseudo basic mode waveguide region is formed of a 1×1 multi-mode interference (MMI).
 12. The semiconductor optical amplifier as set forth in claim 9, wherein each of said second basic mode waveguide region and said pseudo basic mode waveguide region is formed of a waveguide allowing a primary mode.
 13. A semiconductor laser comprising: (a) a basic mode waveguide region which is covered at a rear end thereof with an all-reflection coating and at a front end thereof with a non-reflection coating, and provides a basic mode to a guide wave light; (b) a first multi-mode waveguide region which has a greater waveguide width than that of said basic mode waveguide region, is optically connected to said basic mode waveguide region, and provides a mode including a multi-mode, to said guided wave light; and (c) a second multi-mode waveguide region which has a greater waveguide width than that of said first multi-mode waveguide region, is optically connected to said first multi-mode waveguide region, and provides a mode including a multi-mode, to said guided wave light.
 14. The semiconductor laser as set forth in claim 13, wherein each of said first and second multi-mode waveguide regions is formed as a 1×1 multi-mode waveguide.
 15. The semiconductor laser as set forth in claim 13, further comprising one of a second basic mode waveguide region and pseudo basic mode waveguide region, both optically connected to said second multi-mode waveguide region at its output end.
 16. The semiconductor laser as set forth in claim 15, wherein each of said second basic mode waveguide region and said pseudo basic mode waveguide region is formed of a single mode waveguide.
 17. The semiconductor laser as set forth in claim 15, wherein each of said second basic mode waveguide region and said pseudo basic mode waveguide region is formed of a 1×1 multi-mode interference (MMI).
 18. The semiconductor laser as set forth in claim 15, wherein each of said second basic mode waveguide region and said pseudo basic mode waveguide region is formed of a waveguide allowing a primary mode.
 19. A semiconductor laser comprising: (a) a basic mode waveguide region which is covered at a rear end thereof with an all-reflection coating and at a front end thereof with a non-reflection coating, and provides a basic mode to a guide wave light; (b) a first multi-mode waveguide region which has a greater waveguide width than that of said basic mode waveguide region, is optically connected to said basic mode waveguide region, and provides a mode including a multi-mode, to said guided wave light; and (c) a second multi-mode waveguide region which has a greater waveguide width than that of said first multi-mode waveguide region, is optically connected to said first multi-mode waveguide region, and provides a mode including a multi-mode, to said guided wave light, wherein at least one of said first and second multi-mode waveguide regions is comprised of a plurality of such sub-regions that a sub-region located closer to an output end of said semiconductor optical amplifier has a greater waveguide width.
 20. The semiconductor laser as set forth in claim 19, wherein each of said first and second multi-mode waveguide regions is formed as a 1×1 multi-mode waveguide.
 21. The semiconductor laser as set forth in claim 19, further comprising one of a second basic mode waveguide region and pseudo basic mode waveguide region, both optically connected to said second multi-mode waveguide region at its output end.
 22. The semiconductor laser as set forth in claim 21, wherein each of said second basic mode waveguide region and said pseudo basic mode waveguide region is formed of a single mode waveguide.
 23. The semiconductor laser as set forth in claim 21, wherein each of said second basic mode waveguide region and said pseudo basic mode waveguide region is formed of a 1×1 multi-mode interference (MMI).
 24. The semiconductor laser as set forth in claim 21, wherein each of said second basic mode waveguide region and said pseudo basic mode waveguide region is formed of a waveguide allowing a primary mode. 